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Browsing by Author "Niedermann, P."

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    Characterization of conductive probes for atomic force microscopy

    Trenkler, Thomas
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    Hantschel, Thomas  
    ;
    Vandervorst, Wilfried  
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    Hellemans, L.
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    Kulisch, W.
    Proceedings paper
    1999, Design, Test, and Microfabrication of MEMS and MOEMS; 30 March - 1 April 1999; Paris, France., 30/03/1999, p.1168-1179
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    Cross-sectional nano-spreading resistance profiling

    De Wolf, Peter
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    Clarysse, Trudo
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    Vandervorst, Wilfried  
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    Hellemans, L.
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    Niedermann, P.
    ;
    Hänni, W.
    Journal article
    1998, Journal of Vacuum Science and Technology B, (16) 1, p.355-361
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    Cross-sectional nano-srp dopant profiling

    De Wolf, Peter
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    Clarysse, Trudo
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    Vandervorst, Wilfried  
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    Hellemans, L.
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    Niedermann, P.
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    Hanni, W.
    Proceedings paper
    1997, 4th International Workshop on the Measurement, Characterization and Modelling of Ultra-Shallow Doping Profiles, 6/04/1997, p.56.1-56.1
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    Evaluating probes for "electrical" atomic force microscopy

    Trenkler, Thomas
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    Hantschel, Thomas  
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    Stephenson, Robert
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    De Wolf, Peter
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    Vandervorst, Wilfried  
    Journal article
    2000, J. Vacuum Science and Technology B, (B18) 1, p.418-427
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    Evaluating probes for "electrical" atomic force microscopy

    Trenkler, Thomas
    ;
    Hantschel, Thomas  
    ;
    Stephenson, Robert
    ;
    De Wolf, Peter
    ;
    Hellemans, L.
    Proceedings paper
    1999, Proceedings 5th International Workshop on the Measurement, Characterization, and Modeling of Ultra-Shallow Doping Profiles in Se, 28/03/1999, p.423-436
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    Highly conductive diamond probes for scanning spreading resistance microscopy

    Hantschel, Thomas  
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    Niedermann, P.
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    Trenkler, Thomas
    ;
    Vandervorst, Wilfried  
    Journal article
    2000, Applied Physics Letters, (76) 12, p.1603-1605
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    Integrating diamond pyramids into metal cantilevers and using them as electrical AFM probes

    Hantschel, Thomas  
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    Slesazeck, Stefan
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    Niedermann, P.
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    Eyben, Pierre  
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    Vandervorst, Wilfried  
    Journal article
    2001, Microelectronic Engineering, (57-58) 1_4, p.749-754
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    Mounting of moulded AFM probes by soldering

    Hantschel, Thomas  
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    Pape, U.
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    Slesazeck, Stefan
    ;
    Niedermann, P.
    ;
    Vandervorst, Wilfried  
    Proceedings paper
    2000, Materials and Device Characterization in Micromachining III, 17/09/2000, p.62-73

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