Browsing by Author "Niedernostheide, F.J."
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Publication A low temperature technology on the base of hydrogen enhanced thermal donor formation for future high voltage applications
Proceedings paper2002, Proceedings of the 11th International Workshop on Physics of Semiconductor Devices, 11/12/2001, p.405-413Publication Low temperature doping of silicon by hydrogen plasma treatments
Proceedings paper2002, High Purity Silicon VII, 20/10/2002, p.141-154