Browsing by Author "Nielsen, Peter Folmer"
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Publication Systematic study of shallow junction formation on Germanium substrates
Meeting abstract2010, E-MRS Spring Meeting Symposium H: Post-Si CMOS Electronic Devices: The Role of Ge and III-V Materials, 7/06/2010Publication Ultra shallow arsenic junctions in germanium formed by millisecond laser annealing
; ; ; ; ;Petersen, Dirch HjorthHansen, OleJournal article2011, Electrochemical and Solid-State Letters, (14) 1, p.H39-H41