Browsing by Author "Nozawa, S."
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Publication A Novel Volatile Film for Dielectric Plasma Damage Protection
Meeting abstract2019, Plasma Etch and Strip in Microtechnology Workshop - PESM, 20/05/2019Publication Gas-phase pore stuffing for low-damage patterning of organo-silicate glass dielectric materials
Meeting abstract2018, AVS 65th Meeting & Exhibition 2018, 21/10/2018, p.PSM-WeA9Publication Novel volatile film for the protection of organo-silicate glass dielectric materials
Publication Use of a thermally degradable chemical vapor deposited polymer film for low damage plasma processing of highly porous dielectrics
Journal article2019, ACS Applied Electronic Materials, (1) 12, p.2602-2611