Browsing by Author "Orzali, Tommaso"
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Publication Epitaxy of III-V based channels on Si and transistor integration for 12-nm node CMOS
Proceedings paper2012, 24th Conference on Indium Phosphide and Related Materials - IPRM, 27/08/2012Publication In-Situ HCl etching of InP in shallow-trench-isolated structures
Journal article2012, Journal of the Electrochemical Society, (159) 4, p.H455-H459Publication In-Situ HCl etching of InP in shallow-trench-isolated structures
Meeting abstract2011, 220th ECS Fall Meeting, 9/10/2011, p.2153Publication In-Situ HCl etching of InP in shallow-trench-isolated structures
Proceedings paper2011, ULSI Process Integration 7, 9/10/2011, p.345-354Publication Integration of III-V on Si for high-mobility CMOS
Proceedings paper2012, International Silicon-Germanium Technology and Device Meeting - ISTDM, 4/06/2012Publication Integration of InGaAs channel n-MOS devices on 200mm Si wafers using the aspect-ratio-trapping technique
Proceedings paper2012, Graphene, Ge/III-V, Nanowires, and Emerging Materials for Post-CMOS Applications 4, 6/05/2012, p.115-128Publication Optical metrology of thickness and indium content of epitaxial InxGa1-xAs layers on Si substrates
Proceedings paper2012, 23rd annual SEMI Advanced Semiconductor Manufacturing Conference - ASMC, 15/05/2012, p.77-81Publication Selective area growth of InP on on-axis Si(001) substrates with low antiphase boundary formation
Proceedings paper2011, ULSI Process Integration 7, 9/10/2011, p.249-263Publication Selective area growth of InP and defect elimination on Si (001) substrates
Meeting abstract2011, 220th ECS Fall Meeting, 9/10/2011, p.2134Publication Selective area growth of InP on on-axis Si(001) substrates with low antiphase boundary formation
Journal article2012, Journal of the Electrochemical Society, (159) 3, p.H260-H265