Epitaxy of III-V based channels on Si and transistor integration for 12-nm node CMOS

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Author(s)

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Merckling, Clement

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Orzali, Tommaso

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Vandervorst, Wilfried

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Dekoster, Johan

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Metrics

1878 since deposited on 2021-10-20

Acq. date: 2025-10-23