Browsing by Author "Oshima, Nagayasu"
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Publication Characterization of porous structures in advanced low-k films with thin TaN layers using monoenergetic positron beams
Journal article2013, Japanese Journal of Applied Physics, (52) 10, p.106501Publication Vacancy-Type Defects and Oxygen Incorporation in NiAl for Advanced Interconnects Probed by Monoenergetic Positron Beams and Atom Probe Tomography
Journal article2024, ACS APPLIED ELECTRONIC MATERIALS, (6) 8, p.5894-5902