Browsing by Author "Pan, Wanling"
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Publication A surface micromachined tunable film bulk acoustic resonator
Proceedings paper2004, MEMS, MOEMS, and Micromachining, 29/04/2004, p.166-173Publication A surface micromachined tunable film bulk acoustic resonator
Proceedings paper2004, Technical Digest of Eurosensors XVIII, 12/09/2004, p.99-100Publication Design and fabrication of a surface micromachined frequency tunable film bulk acoustic resonator with an extended electrostatic tuning range
Proceedings paper2005, Proceedings IEEE International Ultrasonics Symposium, 18/09/2005, p.1840-1843Publication Half-conductive coupling interconnection technology for digital transmission between CMOS chips
Journal article2002, IEEE Trans. Advanced Packaging, (25) 1, p.92-97Publication Micromachined tunable dielectric resonators
Proceedings paper2002, Proceedings of the 3rd Workshop on Semiconductor Sensor and Actuator Technology - SeSens, 29/11/2002, p.653-656Publication Theoretical investigation of nanocrystalline diamond thin film bulk acoustic resonators (FBAR) for mass sensing applications
Proceedings paper2005, 16th MicroMechanics Europe Workshop - MME, 5/09/2005, p.232-235