Browsing by Author "Park, Hyung-Sang"
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Publication Low temperature plasma-enhanced ALD enables cost-effective spacer defined double patterning (SDDP)
Proceedings paper2009, SPIE Lithography Asia Taiwan, 18/11/2009, p.75201JPublication Plasma enhanced atomic layer deposition of silicon oxide for through silicon via
Publication Relationships between deposition parameters, step coverage, throughput, and electrical properties of PEALD SiO2 insulation liners for HVM TSV application