Browsing by Author "Park, Tae Joo"
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Publication Atomic layer deposition process of Hf-based high-k gate dielectric film on Si substrate
Publication Fabrication of humidity monitoring sensor using porous silicon nitride structures for alkaline conditions
Journal article2024, SENSORS AND ACTUATORS REPORTS, (8) December, p.Art. 100203Publication Front end of the line process
Book chapter2014, Atomic Layer Deposition for Modern Semiconductor Devices