Browsing by Author "Parsons, Gregory N. N."
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Publication Compatibility between polymethacrylate-based extreme ultraviolet resists and TiO(2 )area-selective deposition
Journal article2022, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (21) 4, p.Art. 041407Publication Quantified Uniformity and Selectivity of TiO2 Films in 45-nm Half Pitch Patterns Using Area-Selective Deposition Supercycles
Journal article2023, ADVANCED MATERIALS INTERFACES, (10) 20, p.Art. 2300163