Publication:
Compatibility between polymethacrylate-based extreme ultraviolet resists and TiO(2 )area-selective deposition
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Acq. date: 2026-07-18
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480 since deposited on 2023-03-01
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Acq. date: 2026-07-18
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1404 since deposited on 2023-03-01
Acq. date: 2026-07-18
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