Browsing by Author "Pavelka, Tibor"
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Publication Contactless mobility measurements of inversion charge carriers on silicon substrates with SiO2 and HfO2 gate dielectrics
Journal article2010, Applied Physics Letters, (96) 12, p.122906Publication Control of laser induced interface traps with in-line corona charge metrology
Proceedings paper2008, 16th Annual IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP, 30/09/2008, p.163-168Publication Monitoring plasma nitridation of HfSiOx by corona charge measurements
Journal article2007, Microelectronic Engineering, (84) 9_10, p.2251-2254Publication Non-contact metrology for inversion charge carrier mobility by corona charge and photovoltage measurements on blank wafers with a gate dielectric
Oral presentation2010, 16th Workshop on Dielectrics in Microelectronics- WoDIMPublication Noncontact metrology for inversion charge carrier mobility by corona charge and photovoltage measurements on blank wafers with a gate dielectric
Journal article2011, Journal of Vacuum Science and Technology B, (29) 1, p.01AB05Publication Novel noncontact approach to characterization of mobility in inversion layers using corona charging of dielectric and SPV monitoring of sheet resistance
Proceedings paper2010, Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-based CMOS 6: New Materials, Processes, and Equipment, 25/04/2010, p.33-41Publication Use of corona charge photo-conductance decay (charge-PCD) for fast metal contamination monitoring of high temperature processes
Proceedings paper2008, IEEE/SEMI Advanced Semiconductor Manufacturing Conference - ASMC, 5/05/2008, p.397-401