Browsing by Author "Pei-Yang, Yan"
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Publication Evidence of speckle in extreme-UV lithography
Journal article2012-10, Optics Express, (20) 23, p.25970-25978Publication Impact of extreme UV mask flatness on resist roughness
Oral presentation2012, Wilhelm and Else Heraeus Physics SchoolPublication Mask roughness effects on pattern variability
Oral presentation2012, International Symposium on Extreme Ultraviolet Lithography - EUVL