Browsing by Author "Pereira, Cheryl"
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Publication Enabling complimentary FET (CFET) fabrication: selective, isotropic etch of Group IV semiconductors
Meeting abstract2019, Advanced Etch Technology for Nanopatterning VIII, 24/02/2019, p.109630LPublication Selective isotropic etching of Group IV semiconductors to enable gate all around device architectures
Meeting abstract2018, Surface Preparation and Cleaning Conference - SPCC, 10/04/2018Publication Si trim applications: benefits and challenges
Meeting abstract2019, Surface Preparation and Cleaning Conference (SPCC), 2/04/2019