Browsing by Author "Petersen Lima, Lucas"
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Publication Very low temperature epitaxy of group-IV semiconductors for use in finFET, stacked nanowires and monolithic 3D integration
Meeting abstract2018, ECS Fall Meeting, SiGe & Ge Symposium, 30/09/2018, p.1050Publication Very low temperature epitaxy of group-IV semiconductors for use in FinFET, stacked nanowires and monolithic 3D integration
Journal article2019, ECS Journal of Solid State Science and Technology, (8) 8, p.P392-P399