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Very low temperature epitaxy of group-IV semiconductors for use in FinFET, stacked nanowires and monolithic 3D integration
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2009 since deposited on 2021-10-27
2last week
Acq. date: 2026-02-04
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Statistics
Views
2009 since deposited on 2021-10-27
2last week
Acq. date: 2026-02-04
Citations