Browsing by Author "Petrik, P."

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Formation mechanism of chemically etched porous silicon

Stalmans, Lieven
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Vazsonyi, Eva
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Bender, Hugo
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Szilagyi, E.
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Jalsovsky, G.
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Horvath, Z. E.
Oral presentation
1997, 17th International Conference on Amorphous and Microcrystalline Semiconductors; August 25-29, 1997; Budapest, Hungary.
High depth resolution depth profile analysis of ultra thin high-k Hf based films using MEIS compared with XTEM, XRF, SE and XPS

van den Berg, J.A.
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Reading, M.A.
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Parisini, A.
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Kolbe, M.
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Beckhoff, B.
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Ladas, S.
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Petrik, P.
Meeting abstract
2009, 216th ECS Meeting, 4/10/2009, p.1994
High depth resolution depth profile analysis of ultra thin high-k Hf based films using MEIS compared with XTEM, XRF, SE and XPS

van den Berg, J.A.
;
Reading, M. A.
;
Parisini, A.
;
Kolbe, M.
;
Beckhoff, B.
;
Ladas, S.
;
Fried, M.
Proceedings paper
2009, Analytical Techniques for Semiconductor Materials and Process Characterization 6, 4/10/2009, p.349-361