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High depth resolution depth profile analysis of ultra thin high-k Hf based films using MEIS compared with XTEM, XRF, SE and XPS
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1878 since deposited on 2021-10-18
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Acq. date: 2025-10-24
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Views
1878 since deposited on 2021-10-18
406item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations