Browsing by Author "Pfeffer, Markus"
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Publication Performance optimization of semiconductor manufacturing equipment by the application of discrete event simulation
Publication Photo-voltage versus micro-probe sheet resistance measurements on ultra-shallow structures
Proceedings paper2009, International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling, 26/04/2009Publication Photovoltage versus microprobe sheet resistance measurements on ultrashallow structures
Journal article2010, Journal of Vacuum Science and Technology B, (28) 1, p.C1C8-C1C14