Browsing by Author "Philippou, Alexander"
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Publication Calibration and verification of a stochastic model for EUV resist
Proceedings paper2012, Extreme Ultraviolet (EUV) Lithography III, 12/02/2012, p.83221DPublication Impact of EUV off-axis illumination on full field imaging performance for NXE:3100
Proceedings paper2011, International Symposium on Extreme Ultraviolet Lithography - EUVL, 17/10/2011