Browsing by Author "Phung, Quan"
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Publication Atomic layer deposition of ruthenium on ruthenium surfaces: a theoretical study
Journal article2015, Journal of Physical Chemistry C, (119) 12, p.6592-6603Publication Atomic layer deposition of ruthenium on titanium nitride surface: a density functional theory study
Journal article2013, Journal of Physical Chemistry C, (117) 37, p.19442-19453Publication Atomic layer deposition of ruthenium thin films from (ethylbenzyl) (1-ethyl-1,4-cyclohexadienyl) Ru: process characteristics, surface chemistry, and film properties
Journal article2017, Chemistry of Materials, (29) 11, p.4654-4666Publication Atomic layer deposition of Ruthenium: a theoretical insight
Meeting abstract2014, 10th Congress of the World Association of Theoretical and Computational Chemists, 5/10/2014Publication Ruthenium nanowires by selective atomic layer deposition
Meeting abstract2013, 13th International Conference on Atomic Layer Deposition - ALD 2013, 28/07/2013Publication Ruthenocene and cyclopentadienyl pyrrolyl ruthenium as precursors for ruthenium atomic layer deposition: a comparative study of dissociation enthalpies
Journal article2012, Theoretical Chemistry Accounts, 131, p.1238-1247