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Conference contributions
Ruthenium nanowires by selective atomic layer deposition
Publication:
Ruthenium nanowires by selective atomic layer deposition
Date
2013
Meeting abstract
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Swerts, Johan
;
Wen, Liang Gong
;
Delabie, Annelies
;
Phung, Quan
;
Boemmels, Juergen
;
Tokei, Zsolt
;
Van Elshocht, Sven
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1914
since deposited on 2021-10-21
Acq. date: 2025-10-24
Citations
Metrics
Views
1914
since deposited on 2021-10-21
Acq. date: 2025-10-24
Citations