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Ruthenium nanowires by selective atomic layer deposition

Date

2013
Meeting abstract
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dc.contributor.authorSwerts, Johan
dc.contributor.authorWen, Liang Gong
dc.contributor.authorDelabie, Annelies
dc.contributor.authorPhung, Quan
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorTokei, Zsolt
dc.contributor.authorVan Elshocht, Sven
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.date.accessioned2021-10-21T12:30:50Z
dc.date.available2021-10-21T12:30:50Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23141
dc.source.conference13th International Conference on Atomic Layer Deposition - ALD 2013
dc.source.conferencedate28/07/2013
dc.source.conferencelocationSan Diego,CA USA
dc.title

Ruthenium nanowires by selective atomic layer deposition

dc.typeMeeting abstract
dspace.entity.typePublication
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