Browsing by Author "Pieri, Francesco"
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Publication Perforated beam resonators as enhanced resonant biosensors
Oral presentation2010, MEMS in Italy. Joint Event with MEMSWAVE ConferencePublication Protein patterning on polycrystalline silicon–germanium via standard UV lithography for bioMEMS applications
Journal article2010, Materials Science and Engineering C, (30) 8, p.1221-1226Publication Selective organic functionalization of polycrystalline silicon-germanium for bioMEMS applications
Journal article2009, Procedia Chemistry, (1) 1, p.252-255Publication Selective surface functionalization of Si and poly-SiGe resonators for a monolithic integration of bio- and gas sensors with CMOS
Meeting abstract2012, MRS Spring Meeting Symposium B: Heterogeneous Integration Challenges of MEMS, Sensor, and CMOS LSI, 9/04/2012Publication Stiction-free poly-SiGe resonant biosensors for monolithic integration with CMOS
Proceedings paper2011, 16th International Solid-State Sensors, Actuators and Microsystems Conference - TRANSDUCERS, 5/06/2011, p.2136-2139