Browsing by Author "Pierloot, Kristine"
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Publication Aluminium oxide atomic layer deposition on semiconductor substrates
Proceedings paper2011, Physics and Technology of High-k Materials 9, 9/10/2011, p.149-160Publication Atomic layer deposition of Ruthenium: a theoretical insight
Meeting abstract2014, 10th Congress of the World Association of Theoretical and Computational Chemists, 5/10/2014Publication Chemisorption reaction mechanisms for atomic layer deposition of high-k oxides on high mobility channel materials
Proceedings paper2010, Atomic Layer Deposition Applications 6, 10/10/2010, p.343-353Publication Chemisorption reaction mechanisms for atomic layer deposition of high-k oxides on high mobility channels
Meeting abstract2010, 218th ECS Meeting Symposium 'Atomic Layer Deposition Applications 6', 10/10/2010, p.1424Publication Mechanisms for the trimethylaluminum reaction in aluminum oxide atomic layer deposition on sulfur passivated germanium
Journal article2011, Journal of Physical Chemistry C, (115) 35, p.17523-17532Publication Reaction mechanisms for atomic layer deposition of aluminum oxide on semiconductor substrates
Journal article2012, Journal of Vacuum Science and Technology A, (30) 1, p.01A127