Publication:
Chemisorption reaction mechanisms for atomic layer deposition of high-k oxides on high mobility channel materials
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1854 since deposited on 2021-10-18
1last month
Acq. date: 2025-12-11
Citations
Metrics
Views
1854 since deposited on 2021-10-18
1last month
Acq. date: 2025-12-11
Citations