Publication:
Chemisorption reaction mechanisms for atomic layer deposition of high-k oxides on high mobility channel materials
Date
| dc.contributor.author | Delabie, Annelies | |
| dc.contributor.author | Sioncke, Sonja | |
| dc.contributor.author | Van Elshocht, Sven | |
| dc.contributor.author | Caymax, Matty | |
| dc.contributor.author | Pourtois, Geoffrey | |
| dc.contributor.author | Pierloot, Kristine | |
| dc.contributor.imecauthor | Delabie, Annelies | |
| dc.contributor.imecauthor | Van Elshocht, Sven | |
| dc.contributor.imecauthor | Caymax, Matty | |
| dc.contributor.imecauthor | Pourtois, Geoffrey | |
| dc.contributor.orcidimec | Van Elshocht, Sven::0000-0002-6512-1909 | |
| dc.contributor.orcidimec | Pourtois, Geoffrey::0000-0003-2597-8534 | |
| dc.date.accessioned | 2021-10-18T15:59:11Z | |
| dc.date.available | 2021-10-18T15:59:11Z | |
| dc.date.issued | 2010 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17005 | |
| dc.source.beginpage | 343 | |
| dc.source.conference | Atomic Layer Deposition Applications 6 | |
| dc.source.conferencedate | 10/10/2010 | |
| dc.source.conferencelocation | Las Vegas, NV USA | |
| dc.source.endpage | 353 | |
| dc.title | Chemisorption reaction mechanisms for atomic layer deposition of high-k oxides on high mobility channel materials | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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