imec Institutional Repository Browsing {{ collection }} by Author "Pique, D."

Publication

Gate dielectrics for high performance and low power CMOS SoC applications

Cubaynes, Florence

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Dachs, Charles

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Detcheverry, Celine

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Zegers, A.

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Venezia, Vincent

Proceedings paper

2002, ESSDERC - 32nd European Solid-State Device Research Conference, 24/09/2002, p.427-430

Publication

Growth and physical properties of MOCVD-deposited hafnium oxide films and their properties on silicon

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Petry, Jasmine

Proceedings paper

2003, Novel Materials and Processes for Advanced CMOS, 2/12/2002, p.197-202

Publication

High-k materials for advanced gate stack dielectrics: a comparison of ALCVD and MOCVD as deposition technologies

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Brijs, Bert

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Proceedings paper

2003, CMOS Front-End Materials and Process Technology, 21/04/2003, p.47-58

Browsing by Author "Pique, D."