Browsing by Author "Polleunis, C."
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Publication Advanced characterisation : an indispensable tool for ultra clean processing
Journal article1995, Microelectronic Engineering, (28) 1_4, p.27-34Publication Degradation of clean Si-surfaces due to storage in clean (?) wafer boxes
Proceedings paper1994, Proceedings of the 2nd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS, 19/09/1994, p.367-370Publication Just-Clean- Enough technology for the 21st century
Oral presentation1995, SEMICON Europe