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Articles
Advanced characterisation : an indispensable tool for ultra clean processing
Publication:
Advanced characterisation : an indispensable tool for ultra clean processing
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Date
1995
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vandervorst, Wilfried
;
Bender, Hugo
;
Storm, Wolfgang
;
Heyns, Marc
;
Polleunis, C.
;
Bertrand, P.
Journal
Microelectronic Engineering
Abstract
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1999
since deposited on 2021-09-29
Acq. date: 2026-01-06
Citations
Metrics
Views
1999
since deposited on 2021-09-29
Acq. date: 2026-01-06
Citations