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Browsing by Author "Probst, Gernot"

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    Publication

    Investigation of Distortion in Wafer-to-wafer Bonding with Highly Bowed Wafers

    Kang, Shuo  
    ;
    Iacovo, Serena  
    ;
    D'have, Koen  
    ;
    Van Huylenbroeck, Stefaan  
    ;
    Okudur, Oguzhan Orkut  
    Proceedings paper
    2024, IEEE 74th Electronic Components and Technology Conference (ECTC), MAY 28-31, 2024, p.386-393

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