Browsing by Author "Quaedackers, John"
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Publication Dense lines created by spacer DPT scheme: process control by local dose adjustment using advanced scanner control
Proceedings paper2009, Optical Microlithography XXII, 23/02/2009, p.72740RPublication Pitch doubling through dual-patterning lithography challenges in integration and litho budgets
Proceedings paper2007, Optical Microlithography XX, 27/02/2007, p.65200GPublication Sub-32nm half pitch imaging with high NA immersion exposure systems using Double Patterning techniques