Browsing by Author "Raineri, V."
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Publication Assessing the performance of two and three dimensional dopant profiling techniques for sub-65nm technologies
Oral presentation2007, International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology, and ModelingPublication Assessing the performance of two-dimensional dopant profiling techniques
Proceedings paper2003, Ultra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic., 27/04/2003, p.215-226Publication Assessing the performance of two-dimensional dopant profiling techniques
Journal article2004, Journal of Vacuum Science and Technology, (22) 1, p.385-393Publication Nanoscale imaging and metrology of devices and innovative materials
Journal article2007, Microelectronic Engineering, (84) 3, p.375