Browsing by Author "Rakhimova, T"

Calculation of dielectric constant of porous SiCOH low-k films

Dependence of electric potential at trench surfaces on ion angula distribution in plasma etching processes

Effect of porosity and pore size on dielectric constant of organosilicate based low-k films : an analytical approach

Effect of VUV photons on low-k OSG damage and etching by F atoms at the lowered temperature