Browsing by Author "Raley, Angelique"

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EUV Metal Oxide Resist Development Technology for Improved Sensitivity, Roughness and Pattern Collapse Margin for High Volume Manufacturing

Dinh, Cong Que
;
Nagahara, Seiji
;
Kuwahara, Yuhei
;
Dauendorffer, Arnaud
;
Yoshida, Keisuke
Journal article
2022, JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY, (35) 1, p.87-93
Ruthenium recess for buried power rail integration

Gupta, Anshul
;
Grzeskowiak, Jodi
;
Jourdan, Nicolas
;
Yu, Kai-Hung
;
Joy, Nicolas
;
Kundu, Shreya
Meeting abstract
2019, IITC-MAM 2019, 3/06/2019, p.4.08