Browsing by Author "Rao, V."
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Publication CMOS-integrated poly-SiGe cantilevers with read/write system for probe storage device
; ;Heck, J. ;Chou, T.K.A. ;Belov, N. ;Park, J.S. ;Harrar, D. ;Jain, A.Proceedings paper2009, Transducers. 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 21/06/2009, p.2409-2412Publication Ultra-high data density MEMS memory device
Meeting abstract2009, 35th International Conference on Micro- and Nano Engineering - MNE, 28/09/2009Publication Ultra-high density MEMS probe memory device
;Heck, John ;Adams, Donald ;Belov, Nicolai ;Chou, T-K.A. ;Kim, B. ;Kornelsen, Kevin ;Ma, Q.Rao, V.Journal article2010, Microelectronic Engineering, (87) 5_8, p.1198-1203