Browsing by Author "Reading, M. A."

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High depth resolution depth profile analysis of ultra thin high-k Hf based films using MEIS compared with XTEM, XRF, SE and XPS

van den Berg, J.A.
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Reading, M. A.
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Parisini, A.
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Kolbe, M.
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Beckhoff, B.
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Ladas, S.
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Fried, M.
Proceedings paper
2009, Analytical Techniques for Semiconductor Materials and Process Characterization 6, 4/10/2009, p.349-361
High resolution medium energy ion scattering (MEIS) analysis for the quantitative depth profiling of ultra thin high-k layers

Reading, M. A.
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van den Berg, J. A.
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Zalm, P. C.
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Armour, D. G.
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Bailey, P.
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Noakes, T. C. Q.
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Parisini, A.
Journal article
2010, Journal of Vacuum Science and Technology B, (28) 1, p.C1C65-C1C70