Browsing by Author "Reuter, Christian"
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Publication Reducing EUV mask 3D effects by alternative metal absorbers
; ; ; ; Evanschitzky, PeterJournal article2017, Journal of Micro/Nanolithography MEMS and MOEMS, (16) 4, p.41002Publication Single element and metal alloy novel EUV mask absorbers for improved imaging
Proceedings paper2017, International Conference on Extreme Ultraviolet Lithpgraphy - EUVL, 11/09/2017, p.104500G