Browsing by Author "Richardson, Paul"
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Publication Bottom-ARC optimization methodology for 0.25μm lithography and beyond
Proceedings paper1998, Optical Microlithography XI, 25/02/1998, p.322-336Publication In situ gas analysis on an RTP tool with APIMS
Proceedings paper1998, 44th Annual Meeting of Inst. Environmental Science and Technology, 26/04/1998, p.519-526Publication Wafer thermal desorption spectrometry in a rapid thermal processor using atmospheric pressure ionization mass spectrometry
Journal article2000, IEEE Trans. Semiconductor Processing, (13) 3, p.315-321