Browsing by Author "Robinson, Alex"
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Publication A Holistic Evaluation of Buried Power Rails and Back-Side Power for Sub-5 nm Technology Nodes
Journal article2022-07-07, IEEE TRANSACTIONS ON ELECTRON DEVICES, (69) 8, p.4453-4459Publication Multi trigger resist for EUV lithography
Journal article2018, Journal of Photopolymer Science and Technology, (31) 2, p.227-232