Browsing by Author "Rosslee, Craig"
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Publication Analysis of the effect of point-of-use filtration on microbridging defectivity
Proceedings paper2009, Advances in Resist Materials and Processing Technology XXVI, 22/02/2009, p.72730SPublication Characterizing immersion lithography micro bridge defects using advanced features of teh SEMVision G3 STAR FIB
Proceedings paper2009, 6th International Symposium on Immersion Lithography Extensions, 22/10/2009Publication Cluster optimization to improve total CD control as an enabler for double patterning
Proceedings paper2008, 5th International Symposium on Immersion Lithography Extensions, 22/09/2008Publication Micro-bridge defects: characterization and root cause analysis
Proceedings paper2010, Metrology, Inspection and Process Control for Microlithography XXIV, 21/02/2010, p.763820Publication Track optimization and control for 32nm node double patterning and beyond
Proceedings paper2009, Metrology, Inspection, and Process Control for Microlithography XXIII, 22/02/2009, p.727236