Browsing by Author "Roth, John"

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Multi trigger resist for EUV lithography

Popescu, Carmen
;
Vesters, Yannick
;
McClelland, Alexandra
;
De Simone, Danilo
;
Dawson, Guy
Journal article
2018, Journal of Photopolymer Science and Technology, (31) 2, p.227-232
Multi-trigger resist patterning with ASML NXE3300 EUV scanner

Vesters, Yannick
;
McClelland, Alexandra
;
De Simone, Danilo
;
Popescu, Carmen
;
Dawson, Guy
Proceedings paper
2018, Extreme Ultraviolet (EUV) Lithography IX, 25/02/2018, p.1058308