Browsing by Author "Royere, Gael"
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Publication Dummy gate amorphous silicon CMP using in-situ profile CLC endpoint system for advanced FinFET
Proceedings paper2017, International Conference on. Planarization/CMP Technology - ICPT, 11/10/2017, p.307-311Publication The impact of the pad surface temperature control on W CMP performance
Proceedings paper2018-10, International Conference on Planarization CMP Technology - ICPT, 14/10/2018, p.C6