Browsing by Author "Rubin, Leonard"
Now showing 1 - 2 of 2
- Results per page
- Sort Options
Publication Influence of the process sequence and termal budget on the strain of SiC stressor layers formed by ion implantation
Proceedings paper2010, 18th IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP, 29/09/2010, p.32-40Publication Influence of the process sequence and termal budget on the straion fof SiC stressor layers formed by Ion Implantation
Meeting abstract2010-10, 18th IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP, 29/09/2010