Publication:
Influence of the process sequence and termal budget on the straion fof SiC stressor layers formed by Ion Implantation
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1925 since deposited on 2021-10-18
4last month
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Acq. date: 2026-10-09
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Statistics
Views
1925 since deposited on 2021-10-18
4last month
2last week
Acq. date: 2026-10-09
Citations