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Influence of the process sequence and termal budget on the straion fof SiC stressor layers formed by Ion Implantation
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1920 since deposited on 2021-10-18
1last month
Acq. date: 2025-12-10
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Views
1920 since deposited on 2021-10-18
1last month
Acq. date: 2025-12-10
Citations