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Influence of the process sequence and termal budget on the strain of SiC stressor layers formed by ion implantation
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1 since deposited on 2021-10-18
Acq. date: 2025-12-10
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1929 since deposited on 2021-10-18
Acq. date: 2025-12-10
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1 since deposited on 2021-10-18
Acq. date: 2025-12-10
Views
1929 since deposited on 2021-10-18
Acq. date: 2025-12-10
Citations