Browsing by Author "Rusu, C."
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Publication Novel high growth rate processes for depositing poly-SiGe structural layers at CMOS compatible temperatures
Proceedings paper2004-01, 17th IEEE International Conference in Micro Electro Mechanical Systems - MEMS, 25/01/2004, p.721-724Publication Self-aligned 0-level sealing of MEMS devices by a two layer thin film reflow process