Browsing by Author "Rusu, Cristina"
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Publication A wet release process for fabricating slender and compliant suspended micro-mechanical structures
Journal article2003, Sensors and Actuators A: Physical, (103) 1_2, p.202-212Publication Direct integration of micromachined pipettes in a flow channel for single DNA molecule study by optical tweezers
Publication Effect of deposition parameters on the stress gradient of CVD and PECVD poly-SiGe for MEMS applications
; Celis, Jean-PierreProceedings paper2004-01, Micromachining and Microfabrication Process Technology IX, 25/01/2004, p.8-18Publication MEMS 0-level packaging using thin film poly-SiGe caps
Proceedings paper2002-09, IMAPS ATW on Packaging of MEMS and Related Micro Integrated Nano Systems, 6/09/2002Publication New low-stress PECVD Poly-SiGe layers for MEMS
Journal article2003, Journal of Microelectromechanical Systems, (12) 6, p.816-825Publication Planarization of deep trenches
Proceedings paper2001, Micromachining and Microfabrication Process Technology VII, 22/10/2001, p.49-57Publication Self-aligned 0-level sealing of MEMS devices by a two-layer thin film reflow process
Publication Stable thin film encapsulation of acceleration sensors using polycrystalline silicon as sacrificial and encapsulation layer
Publication Thin film encapsulation of acceleration sensors using polysilicon sacrificial layers
Publication Zero-level packaging for MEMS
Proceedings paper2002-05, The GOOD-DIE International Workshop CAST - Challenges for Advanced Semiconductor-die Technologies, 22/05/2002