Browsing by Author "Ryssel, H."
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Publication Approach for a standardized methodology for multisite processing of 300-mm wafers at R&D sites
;Oechsner, Richard ;Pfeffer, M. ;Frickinger, J. ;Schellenberger, M. ;Roeder, G.Pfitzner, L.Journal article2007, IEEE Trans. Semiconductor Manufacturing, (20) 3, p.215-221Publication The ADEQUAT project for development and transfer of 0.25µm logic complementary metal-oxide-semiconductor modules
; ; ;Félix, P. ;Haond, M. ;Hill, C. ;Janssen, G.Lorenz, J.Journal article1994, J. Vac. Sci. Technol. B, (12) 4, p.2852-2859